The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
10.1109/JPHOTOV.2014.2298097
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sg-nus-scholar.10635-1287532023-10-29T20:34:02Z The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E. SOLAR ENERGY RESEARCH INST OF S'PORE Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM) 10.1109/JPHOTOV.2014.2298097 IEEE Journal of Photovoltaics 4 2 594-600 2016-10-19T08:44:47Z 2016-10-19T08:44:47Z 2014-03 Article Xu, L., Weber, K., Fell, A., Hameiri, Z., Phang, S.P., Yang, X., Franklin, E. (2014-03). The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell. IEEE Journal of Photovoltaics 4 (2) : 594-600. ScholarBank@NUS Repository. https://doi.org/10.1109/JPHOTOV.2014.2298097 21563381 http://scholarbank.nus.edu.sg/handle/10635/128753 000332008000010 Scopus |
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Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM) |
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Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM) Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E. The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell |
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10.1109/JPHOTOV.2014.2298097 |
author2 |
SOLAR ENERGY RESEARCH INST OF S'PORE |
author_facet |
SOLAR ENERGY RESEARCH INST OF S'PORE Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E. |
format |
Article |
author |
Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E. |
author_sort |
Xu, L. |
title |
The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell |
title_short |
The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell |
title_full |
The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell |
title_fullStr |
The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell |
title_full_unstemmed |
The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell |
title_sort |
impact of sio2/sin\rm x stack thickness on laser doping of silicon solar cell |
publishDate |
2016 |
url |
http://scholarbank.nus.edu.sg/handle/10635/128753 |
_version_ |
1781790606772666368 |