$The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell$

The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

10.1109/JPHOTOV.2014.2298097

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Bibliographic Details
Main Authors:	Xu, L., Weber, K., Fell, A., Hameiri, Z., Phang, S.P., Yang, X., Franklin, E.
Other Authors:	SOLAR ENERGY RESEARCH INST OF S'PORE
Format:	Article
Published:	2016
Subjects:	Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/128753
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-128753
record_format	dspace
spelling	sg-nus-scholar.10635-1287532023-10-29T20:34:02Z The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E. SOLAR ENERGY RESEARCH INST OF S'PORE Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM) 10.1109/JPHOTOV.2014.2298097 IEEE Journal of Photovoltaics 4 2 594-600 2016-10-19T08:44:47Z 2016-10-19T08:44:47Z 2014-03 Article Xu, L., Weber, K., Fell, A., Hameiri, Z., Phang, S.P., Yang, X., Franklin, E. (2014-03). The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell. IEEE Journal of Photovoltaics 4 (2) : 594-600. ScholarBank@NUS Repository. https://doi.org/10.1109/JPHOTOV.2014.2298097 21563381 http://scholarbank.nus.edu.sg/handle/10635/128753 000332008000010 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM)
spellingShingle	Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM) Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E. The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
description	10.1109/JPHOTOV.2014.2298097
author2	SOLAR ENERGY RESEARCH INST OF S'PORE
author_facet	SOLAR ENERGY RESEARCH INST OF S'PORE Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E.
format	Article
author	Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E.
author_sort	Xu, L.
title	The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_short	The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_full	The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_fullStr	The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_full_unstemmed	The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_sort	impact of sio2/sin\rm x stack thickness on laser doping of silicon solar cell
publishDate	2016
url	http://scholarbank.nus.edu.sg/handle/10635/128753
_version_	1781790606772666368

The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

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