The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

10.1109/JPHOTOV.2014.2298097

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Bibliographic Details
Main Authors: Xu, L., Weber, K., Fell, A., Hameiri, Z., Phang, S.P., Yang, X., Franklin, E.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Article
Published: 2016
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/128753
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1287532023-10-29T20:34:02Z The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell Xu, L. Weber, K. Fell, A. Hameiri, Z. Phang, S.P. Yang, X. Franklin, E. SOLAR ENERGY RESEARCH INST OF S'PORE Dielectric films stack laser doping secondary electron microscopy dopant contrast imaging (SEMDCI) transfer length method (TLM) 10.1109/JPHOTOV.2014.2298097 IEEE Journal of Photovoltaics 4 2 594-600 2016-10-19T08:44:47Z 2016-10-19T08:44:47Z 2014-03 Article Xu, L., Weber, K., Fell, A., Hameiri, Z., Phang, S.P., Yang, X., Franklin, E. (2014-03). The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell. IEEE Journal of Photovoltaics 4 (2) : 594-600. ScholarBank@NUS Repository. https://doi.org/10.1109/JPHOTOV.2014.2298097 21563381 http://scholarbank.nus.edu.sg/handle/10635/128753 000332008000010 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Dielectric films stack
laser doping
secondary electron microscopy dopant contrast imaging (SEMDCI)
transfer length method (TLM)
spellingShingle Dielectric films stack
laser doping
secondary electron microscopy dopant contrast imaging (SEMDCI)
transfer length method (TLM)
Xu, L.
Weber, K.
Fell, A.
Hameiri, Z.
Phang, S.P.
Yang, X.
Franklin, E.
The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
description 10.1109/JPHOTOV.2014.2298097
author2 SOLAR ENERGY RESEARCH INST OF S'PORE
author_facet SOLAR ENERGY RESEARCH INST OF S'PORE
Xu, L.
Weber, K.
Fell, A.
Hameiri, Z.
Phang, S.P.
Yang, X.
Franklin, E.
format Article
author Xu, L.
Weber, K.
Fell, A.
Hameiri, Z.
Phang, S.P.
Yang, X.
Franklin, E.
author_sort Xu, L.
title The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_short The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_full The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_fullStr The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_full_unstemmed The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
title_sort impact of sio2/sin\rm x stack thickness on laser doping of silicon solar cell
publishDate 2016
url http://scholarbank.nus.edu.sg/handle/10635/128753
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