The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

• Main Authors: Xu, L., Weber, K., Fell, A., Hameiri, Z., Phang, S.P., Yang, X., Franklin, E.
• Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
• Format: Article
• Published: 2016
• Subjects: Dielectric films stack; laser doping; secondary electron microscopy dopant contrast imaging (SEMDCI); transfer length method (TLM)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/128753
• Institution: National University of Singapore

10.1109/JPHOTOV.2014.2298097