Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture

Surface and Interface Analysis

Saved in:

Bibliographic Details
Main Authors:	Lim, S.F., Wee, A.T.S., Lin, J., Chua, D.H.C.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96132
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-96132
record_format	dspace
spelling	sg-nus-scholar.10635-961322015-01-16T09:44:57Z Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture Lim, S.F. Wee, A.T.S. Lin, J. Chua, D.H.C. PHYSICS Surface and Interface Analysis 28 1 212-216 SIAND 2014-10-16T09:19:51Z 2014-10-16T09:19:51Z 1999 Article Lim, S.F.,Wee, A.T.S.,Lin, J.,Chua, D.H.C. (1999). Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture. Surface and Interface Analysis 28 (1) : 212-216. ScholarBank@NUS Repository. 01422421 http://scholarbank.nus.edu.sg/handle/10635/96132 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Surface and Interface Analysis
author2	PHYSICS
author_facet	PHYSICS Lim, S.F. Wee, A.T.S. Lin, J. Chua, D.H.C.
format	Article
author	Lim, S.F. Wee, A.T.S. Lin, J. Chua, D.H.C.
spellingShingle	Lim, S.F. Wee, A.T.S. Lin, J. Chua, D.H.C. Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture
author_sort	Lim, S.F.
title	Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture
title_short	Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture
title_full	Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture
title_fullStr	Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture
title_full_unstemmed	Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture
title_sort	crystalline carbon nitride deposition by r.f.-pecvd using a c2h4-nh3-h2 source gas mixture
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96132
_version_	1681091604118503424

Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture

Similar Items