Crystalline carbon nitride deposition by r.f.-PECVD using a C2H4-NH3-H2 source gas mixture

Surface and Interface Analysis

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Bibliographic Details
Main Authors:	Lim, S.F., Wee, A.T.S., Lin, J., Chua, D.H.C.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96132
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Institution:	National University of Singapore

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