Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films
Diamond and Related Materials
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/96133 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-96133 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-961332024-11-13T13:30:31Z Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. PHYSICS MATERIALS SCIENCE Annealing Carbon nitride R.f. magnetron sputtering Structure Diamond and Related Materials 8 10 1906-1912 DRMTE 2014-10-16T09:19:52Z 2014-10-16T09:19:52Z 1999-10 Article Chen, G.L.,Li, Y.,Lin, J.,Huan, C.H.A.,Guo, Y.P. (1999-10). Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films. Diamond and Related Materials 8 (10) : 1906-1912. ScholarBank@NUS Repository. 09259635 http://scholarbank.nus.edu.sg/handle/10635/96133 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Annealing Carbon nitride R.f. magnetron sputtering Structure |
| spellingShingle |
Annealing Carbon nitride R.f. magnetron sputtering Structure Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films |
| description |
Diamond and Related Materials |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. |
| format |
Article |
| author |
Chen, G.L. Li, Y. Lin, J. Huan, C.H.A. Guo, Y.P. |
| author_sort |
Chen, G.L. |
| title |
Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films |
| title_short |
Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films |
| title_full |
Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films |
| title_fullStr |
Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films |
| title_full_unstemmed |
Crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films |
| title_sort |
crystallization by post-treatment of reactive r.f.-magnetron-sputtered carbon nitride films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96133 |
| _version_ |
1821204524317016064 |