Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry
10.1116/1.2429671
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sg-nus-scholar.10635-961732023-10-30T20:06:22Z Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry Chanbasha, A.R. Wee, A.T.S. PHYSICS 10.1116/1.2429671 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 1 277-285 JVTBD 2014-10-16T09:20:23Z 2014-10-16T09:20:23Z 2007 Article Chanbasha, A.R., Wee, A.T.S. (2007). Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 (1) : 277-285. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2429671 10711023 http://scholarbank.nus.edu.sg/handle/10635/96173 000244512400051 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1116/1.2429671 |
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PHYSICS |
| author_facet |
PHYSICS Chanbasha, A.R. Wee, A.T.S. |
| format |
Article |
| author |
Chanbasha, A.R. Wee, A.T.S. |
| spellingShingle |
Chanbasha, A.R. Wee, A.T.S. Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry |
| author_sort |
Chanbasha, A.R. |
| title |
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry |
| title_short |
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry |
| title_full |
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry |
| title_fullStr |
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry |
| title_full_unstemmed |
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs+ secondary ion mass spectrometry |
| title_sort |
depth resolution studies in sige delta-doped multilayers using ultralow-energy cs+ secondary ion mass spectrometry |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96173 |
| _version_ |
1781786400813744128 |