Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon
10.1016/S0026-2692(99)00017-8
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sg-nus-scholar.10635-963622023-10-30T07:28:51Z Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon Zhang, Q. Yoon, S.F. Ahn, J. Rusli Yang, H. Yang, C. Watt, F. Teo, E.J. Osipowice, T. PHYSICS 10.1016/S0026-2692(99)00017-8 Microelectronics Journal 30 8 801-805 MICEB 2014-10-16T09:22:33Z 2014-10-16T09:22:33Z 1999-08 Article Zhang, Q., Yoon, S.F., Ahn, J., Rusli, Yang, H., Yang, C., Watt, F., Teo, E.J., Osipowice, T. (1999-08). Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon. Microelectronics Journal 30 (8) : 801-805. ScholarBank@NUS Repository. https://doi.org/10.1016/S0026-2692(99)00017-8 00262692 http://scholarbank.nus.edu.sg/handle/10635/96362 000080914000010 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
10.1016/S0026-2692(99)00017-8 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Zhang, Q. Yoon, S.F. Ahn, J. Rusli Yang, H. Yang, C. Watt, F. Teo, E.J. Osipowice, T. |
| format |
Article |
| author |
Zhang, Q. Yoon, S.F. Ahn, J. Rusli Yang, H. Yang, C. Watt, F. Teo, E.J. Osipowice, T. |
| spellingShingle |
Zhang, Q. Yoon, S.F. Ahn, J. Rusli Yang, H. Yang, C. Watt, F. Teo, E.J. Osipowice, T. Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon |
| author_sort |
Zhang, Q. |
| title |
Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon |
| title_short |
Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon |
| title_full |
Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon |
| title_fullStr |
Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon |
| title_full_unstemmed |
Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon |
| title_sort |
effects of high energetic he+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96362 |
| _version_ |
1781786438661046272 |