Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure

10.1063/1.1467970

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Main Authors: Wang, S.J., Ong, C.K.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96512
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-965122023-10-30T07:29:27Z Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure Wang, S.J. Ong, C.K. PHYSICS 10.1063/1.1467970 Applied Physics Letters 80 14 2541-2543 APPLA 2014-10-16T09:24:17Z 2014-10-16T09:24:17Z 2002-04-08 Article Wang, S.J., Ong, C.K. (2002-04-08). Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure. Applied Physics Letters 80 (14) : 2541-2543. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1467970 00036951 http://scholarbank.nus.edu.sg/handle/10635/96512 000174765900037 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.1467970
author2 PHYSICS
author_facet PHYSICS
Wang, S.J.
Ong, C.K.
format Article
author Wang, S.J.
Ong, C.K.
spellingShingle Wang, S.J.
Ong, C.K.
Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure
author_sort Wang, S.J.
title Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure
title_short Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure
title_full Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure
title_fullStr Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure
title_full_unstemmed Epitaxial Y-stabilized ZrO2 films on silicon: Dynamic growth process and interface structure
title_sort epitaxial y-stabilized zro2 films on silicon: dynamic growth process and interface structure
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96512
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