Fabrication of a TiNx/Ni/Au contact on ZnO films with high thermal stability and low resistance

Fabrication of a TiNx/Ni/Au contact on ZnO films with high thermal stability and low resistance

10.1109/TED.2011.2169265

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Bibliographic Details
Main Authors: Chai, J.W., Yang, M., Chi, D.Z., Ong, J.L.T., Wang, S.J., Zhang, Z., Pan, J.S., Feng, Y.P., Chua, S.J.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Metal contact
zinc oxide (ZnO)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96588
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Institution: National University of Singapore
Description
Summary:10.1109/TED.2011.2169265

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