Fabrication of a TiNx/Ni/Au contact on ZnO films with high thermal stability and low resistance

• Main Authors: Chai, J.W., Yang, M., Chi, D.Z., Ong, J.L.T., Wang, S.J., Zhang, Z., Pan, J.S., Feng, Y.P., Chua, S.J.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: Metal contact; zinc oxide (ZnO)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/96588
• Institution: National University of Singapore

10.1109/TED.2011.2169265