Fabrication of concave silicon micro-mirrors

10.1364/OE.18.14511

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Bibliographic Details
Main Authors:	Ow, Y.S., Breese, M.B.H., Azimi, S.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96591
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Institution:	National University of Singapore

Description
Summary:	10.1364/OE.18.14511

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