Fabrication of concave silicon micro-mirrors

10.1364/OE.18.14511

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Bibliographic Details
Main Authors:	Ow, Y.S., Breese, M.B.H., Azimi, S.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96591
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96591
record_format	dspace
spelling	sg-nus-scholar.10635-965912015-01-16T19:31:04Z Fabrication of concave silicon micro-mirrors Ow, Y.S. Breese, M.B.H. Azimi, S. PHYSICS 10.1364/OE.18.14511 Optics Express 18 14 14511-14518 2014-10-16T09:25:13Z 2014-10-16T09:25:13Z 2010-07-05 Article Ow, Y.S.,Breese, M.B.H.,Azimi, S. (2010-07-05). Fabrication of concave silicon micro-mirrors. Optics Express 18 (14) : 14511-14518. ScholarBank@NUS Repository. <a href="https://doi.org/10.1364/OE.18.14511" target="_blank">https://doi.org/10.1364/OE.18.14511</a> 10944087 http://scholarbank.nus.edu.sg/handle/10635/96591 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1364/OE.18.14511
author2	PHYSICS
author_facet	PHYSICS Ow, Y.S. Breese, M.B.H. Azimi, S.
format	Article
author	Ow, Y.S. Breese, M.B.H. Azimi, S.
spellingShingle	Ow, Y.S. Breese, M.B.H. Azimi, S. Fabrication of concave silicon micro-mirrors
author_sort	Ow, Y.S.
title	Fabrication of concave silicon micro-mirrors
title_short	Fabrication of concave silicon micro-mirrors
title_full	Fabrication of concave silicon micro-mirrors
title_fullStr	Fabrication of concave silicon micro-mirrors
title_full_unstemmed	Fabrication of concave silicon micro-mirrors
title_sort	fabrication of concave silicon micro-mirrors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96591
_version_	1681091687798013952

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