High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Bibliographic Details
Main Authors: Teo, E.J., Breese, M.B.H., Bettiol, A.A., Watt, F., Alves, L.C.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96789
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Institution: National University of Singapore
Description
Summary:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures