High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Main Authors:	Teo, E.J., Breese, M.B.H., Bettiol, A.A., Watt, F., Alves, L.C.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96789
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-967892015-01-08T18:09:17Z High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications Teo, E.J. Breese, M.B.H. Bettiol, A.A. Watt, F. Alves, L.C. PHYSICS Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 2 560-564 JVTBD 2014-10-16T09:27:32Z 2014-10-16T09:27:32Z 2004-03 Article Teo, E.J.,Breese, M.B.H.,Bettiol, A.A.,Watt, F.,Alves, L.C. (2004-03). High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 (2) : 560-564. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/96789 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
author2	PHYSICS
author_facet	PHYSICS Teo, E.J. Breese, M.B.H. Bettiol, A.A. Watt, F. Alves, L.C.
format	Article
author	Teo, E.J. Breese, M.B.H. Bettiol, A.A. Watt, F. Alves, L.C.
spellingShingle	Teo, E.J. Breese, M.B.H. Bettiol, A.A. Watt, F. Alves, L.C. High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications
author_sort	Teo, E.J.
title	High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications
title_short	High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications
title_full	High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications
title_fullStr	High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications
title_full_unstemmed	High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications
title_sort	high quality ion-induced secondary electron imaging for mev nuclear microprobe applications
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96789
_version_	1681091723392974848

High quality ion-induced secondary electron imaging for MeV nuclear microprobe applications

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