Improved beam spot measurements in the 2nd generation proton beam writing system

Improved beam spot measurements in the 2nd generation proton beam writing system

10.1016/j.nimb.2012.10.033

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Bibliographic Details
Main Authors: Yao, Y., Van Mourik, M.W., Santhana Raman, P., Van Kan, J.A.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96879
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Institution: National University of Singapore
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Summary:10.1016/j.nimb.2012.10.033

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