Improved beam spot measurements in the 2nd generation proton beam writing system

10.1016/j.nimb.2012.10.033

Saved in:

Bibliographic Details
Main Authors:	Yao, Y., Van Mourik, M.W., Santhana Raman, P., Van Kan, J.A.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96879
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-96879
record_format	dspace
spelling	sg-nus-scholar.10635-968792023-10-31T08:00:28Z Improved beam spot measurements in the 2nd generation proton beam writing system Yao, Y. Van Mourik, M.W. Santhana Raman, P. Van Kan, J.A. PHYSICS 10.1016/j.nimb.2012.10.033 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 306 265-270 NIMBE 2014-10-16T09:28:38Z 2014-10-16T09:28:38Z 2013 Article Yao, Y., Van Mourik, M.W., Santhana Raman, P., Van Kan, J.A. (2013). Improved beam spot measurements in the 2nd generation proton beam writing system. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 306 : 265-270. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2012.10.033 0168583X http://scholarbank.nus.edu.sg/handle/10635/96879 000321085900056 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/j.nimb.2012.10.033
author2	PHYSICS
author_facet	PHYSICS Yao, Y. Van Mourik, M.W. Santhana Raman, P. Van Kan, J.A.
format	Article
author	Yao, Y. Van Mourik, M.W. Santhana Raman, P. Van Kan, J.A.
spellingShingle	Yao, Y. Van Mourik, M.W. Santhana Raman, P. Van Kan, J.A. Improved beam spot measurements in the 2nd generation proton beam writing system
author_sort	Yao, Y.
title	Improved beam spot measurements in the 2nd generation proton beam writing system
title_short	Improved beam spot measurements in the 2nd generation proton beam writing system
title_full	Improved beam spot measurements in the 2nd generation proton beam writing system
title_fullStr	Improved beam spot measurements in the 2nd generation proton beam writing system
title_full_unstemmed	Improved beam spot measurements in the 2nd generation proton beam writing system
title_sort	improved beam spot measurements in the 2nd generation proton beam writing system
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96879
_version_	1781786561147305984

Improved beam spot measurements in the 2nd generation proton beam writing system

Similar Items