Investigation of tungsten incorporated amorphous carbon film

10.1016/S0040-6090(99)00511-8

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Bibliographic Details
Main Authors:	Rusli, Yoon, S.F., Yang, H., Ahn, J., Huang, Q.F., Zhang, Q., Guo, Y.P., Yang, C.Y., Teo, E.J., Wee, A.T.S., Huan, A.C.H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96986
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96986
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spelling	sg-nus-scholar.10635-969862023-08-31T21:34:48Z Investigation of tungsten incorporated amorphous carbon film Rusli Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J. Wee, A.T.S. Huan, A.C.H. PHYSICS 10.1016/S0040-6090(99)00511-8 Thin Solid Films 355 174-178 THSFA 2014-10-16T09:29:56Z 2014-10-16T09:29:56Z 1999-11-01 Article Rusli, Yoon, S.F., Yang, H., Ahn, J., Huang, Q.F., Zhang, Q., Guo, Y.P., Yang, C.Y., Teo, E.J., Wee, A.T.S., Huan, A.C.H. (1999-11-01). Investigation of tungsten incorporated amorphous carbon film. Thin Solid Films 355 : 174-178. ScholarBank@NUS Repository. https://doi.org/10.1016/S0040-6090(99)00511-8 00406090 http://scholarbank.nus.edu.sg/handle/10635/96986 000084500800030 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/S0040-6090(99)00511-8
author2	PHYSICS
author_facet	PHYSICS Rusli Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J. Wee, A.T.S. Huan, A.C.H.
format	Article
author	Rusli Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J. Wee, A.T.S. Huan, A.C.H.
spellingShingle	Rusli Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J. Wee, A.T.S. Huan, A.C.H. Investigation of tungsten incorporated amorphous carbon film
author_sort	Rusli
title	Investigation of tungsten incorporated amorphous carbon film
title_short	Investigation of tungsten incorporated amorphous carbon film
title_full	Investigation of tungsten incorporated amorphous carbon film
title_fullStr	Investigation of tungsten incorporated amorphous carbon film
title_full_unstemmed	Investigation of tungsten incorporated amorphous carbon film
title_sort	investigation of tungsten incorporated amorphous carbon film
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96986
_version_	1776259967964151808

Investigation of tungsten incorporated amorphous carbon film

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