Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates
Applied Physics Letters
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sg-nus-scholar.10635-970472015-01-16T16:31:17Z Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates Chen, S.Y. Shen, Z.X. Chen, Z.D. Chan, L.H. See, A.K. PHYSICS Applied Physics Letters 75 12 1727-1729 APPLA 2014-10-16T09:30:39Z 2014-10-16T09:30:39Z 1999-09-20 Article Chen, S.Y.,Shen, Z.X.,Chen, Z.D.,Chan, L.H.,See, A.K. (1999-09-20). Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates. Applied Physics Letters 75 (12) : 1727-1729. ScholarBank@NUS Repository. 00036951 http://scholarbank.nus.edu.sg/handle/10635/97047 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Applied Physics Letters |
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PHYSICS |
| author_facet |
PHYSICS Chen, S.Y. Shen, Z.X. Chen, Z.D. Chan, L.H. See, A.K. |
| format |
Article |
| author |
Chen, S.Y. Shen, Z.X. Chen, Z.D. Chan, L.H. See, A.K. |
| spellingShingle |
Chen, S.Y. Shen, Z.X. Chen, Z.D. Chan, L.H. See, A.K. Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates |
| author_sort |
Chen, S.Y. |
| title |
Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates |
| title_short |
Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates |
| title_full |
Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates |
| title_fullStr |
Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates |
| title_full_unstemmed |
Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substrates |
| title_sort |
laser-induced direct formation of c54 tisi2 films with fine grains on c-si substrates |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/97047 |
| _version_ |
1681091769885786112 |