Measurement of phosphorus content in silica layers

Nuclear Inst. and Methods in Physics Research, B

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Bibliographic Details
Main Authors:	Loh, K.K., Sow, C.H., Tan, K.H., Tan, H.S., Tang, S.M., Orlic, I., Osipowicz, T.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97159
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-971592015-01-16T21:54:16Z Measurement of phosphorus content in silica layers Loh, K.K. Sow, C.H. Tan, K.H. Tan, H.S. Tang, S.M. Orlic, I. Osipowicz, T. PHYSICS Nuclear Inst. and Methods in Physics Research, B 75 1-4 364-366 NIMBE 2014-10-16T09:31:59Z 2014-10-16T09:31:59Z 1993-04-03 Article Loh, K.K.,Sow, C.H.,Tan, K.H.,Tan, H.S.,Tang, S.M.,Orlic, I.,Osipowicz, T. (1993-04-03). Measurement of phosphorus content in silica layers. Nuclear Inst. and Methods in Physics Research, B 75 (1-4) : 364-366. ScholarBank@NUS Repository. 0168583X http://scholarbank.nus.edu.sg/handle/10635/97159 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Nuclear Inst. and Methods in Physics Research, B
author2	PHYSICS
author_facet	PHYSICS Loh, K.K. Sow, C.H. Tan, K.H. Tan, H.S. Tang, S.M. Orlic, I. Osipowicz, T.
format	Article
author	Loh, K.K. Sow, C.H. Tan, K.H. Tan, H.S. Tang, S.M. Orlic, I. Osipowicz, T.
spellingShingle	Loh, K.K. Sow, C.H. Tan, K.H. Tan, H.S. Tang, S.M. Orlic, I. Osipowicz, T. Measurement of phosphorus content in silica layers
author_sort	Loh, K.K.
title	Measurement of phosphorus content in silica layers
title_short	Measurement of phosphorus content in silica layers
title_full	Measurement of phosphorus content in silica layers
title_fullStr	Measurement of phosphorus content in silica layers
title_full_unstemmed	Measurement of phosphorus content in silica layers
title_sort	measurement of phosphorus content in silica layers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97159
_version_	1681091790158954496

Measurement of phosphorus content in silica layers

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