Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon

10.1016/j.nimb.2010.01.015

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Bibliographic Details
Main Authors:	Ow, Y.S., Breese, M.B.H., Leng, Y.R., Azimi, S., Teo, E.J., Sun, X.W.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Computer generated holograms Holography Ion beam irradiation Micromachining Silicon
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97194
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-97194
record_format	dspace
spelling	sg-nus-scholar.10635-971942023-10-29T23:13:17Z Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon Ow, Y.S. Breese, M.B.H. Leng, Y.R. Azimi, S. Teo, E.J. Sun, X.W. PHYSICS Computer generated holograms Holography Ion beam irradiation Micromachining Silicon 10.1016/j.nimb.2010.01.015 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 268 9 1416-1421 NIMBE 2014-10-16T09:32:23Z 2014-10-16T09:32:23Z 2010-05-01 Article Ow, Y.S., Breese, M.B.H., Leng, Y.R., Azimi, S., Teo, E.J., Sun, X.W. (2010-05-01). Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 268 (9) : 1416-1421. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2010.01.015 0168583X http://scholarbank.nus.edu.sg/handle/10635/97194 000277679300009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Computer generated holograms Holography Ion beam irradiation Micromachining Silicon
spellingShingle	Computer generated holograms Holography Ion beam irradiation Micromachining Silicon Ow, Y.S. Breese, M.B.H. Leng, Y.R. Azimi, S. Teo, E.J. Sun, X.W. Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon
description	10.1016/j.nimb.2010.01.015
author2	PHYSICS
author_facet	PHYSICS Ow, Y.S. Breese, M.B.H. Leng, Y.R. Azimi, S. Teo, E.J. Sun, X.W.
format	Article
author	Ow, Y.S. Breese, M.B.H. Leng, Y.R. Azimi, S. Teo, E.J. Sun, X.W.
author_sort	Ow, Y.S.
title	Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon
title_short	Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon
title_full	Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon
title_fullStr	Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon
title_full_unstemmed	Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon
title_sort	micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97194
_version_	1781786621522214912

Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon

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