Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane
10.1021/nl052478c
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sg-nus-scholar.10635-976412023-10-25T21:07:00Z Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane Van Kan, J.A. Bettiol, A.A. Watt, F. PHYSICS 10.1021/nl052478c Nano Letters 6 3 579-582 2014-10-16T09:37:37Z 2014-10-16T09:37:37Z 2006-03 Article Van Kan, J.A., Bettiol, A.A., Watt, F. (2006-03). Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane. Nano Letters 6 (3) : 579-582. ScholarBank@NUS Repository. https://doi.org/10.1021/nl052478c 15306984 http://scholarbank.nus.edu.sg/handle/10635/97641 000236049800048 Scopus |
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Asia |
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Singapore Singapore |
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| description |
10.1021/nl052478c |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Van Kan, J.A. Bettiol, A.A. Watt, F. |
| format |
Article |
| author |
Van Kan, J.A. Bettiol, A.A. Watt, F. |
| spellingShingle |
Van Kan, J.A. Bettiol, A.A. Watt, F. Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane |
| author_sort |
Van Kan, J.A. |
| title |
Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane |
| title_short |
Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane |
| title_full |
Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane |
| title_fullStr |
Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane |
| title_full_unstemmed |
Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane |
| title_sort |
proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/97641 |
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1781786710611329024 |