Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics
10.1088/0268-1242/18/2/316
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sg-nus-scholar.10635-977562023-10-26T22:05:21Z Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics Wang, S.J. Ong, C.K. PHYSICS 10.1088/0268-1242/18/2/316 Semiconductor Science and Technology 18 2 154-157 SSTEE 2014-10-16T09:38:59Z 2014-10-16T09:38:59Z 2003-02 Article Wang, S.J., Ong, C.K. (2003-02). Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics. Semiconductor Science and Technology 18 (2) : 154-157. ScholarBank@NUS Repository. https://doi.org/10.1088/0268-1242/18/2/316 02681242 http://scholarbank.nus.edu.sg/handle/10635/97756 000181119400018 Scopus |
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Singapore Singapore |
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| description |
10.1088/0268-1242/18/2/316 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Wang, S.J. Ong, C.K. |
| format |
Article |
| author |
Wang, S.J. Ong, C.K. |
| spellingShingle |
Wang, S.J. Ong, C.K. Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics |
| author_sort |
Wang, S.J. |
| title |
Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics |
| title_short |
Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics |
| title_full |
Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics |
| title_fullStr |
Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics |
| title_full_unstemmed |
Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics |
| title_sort |
rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/97756 |
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