Rapid thermal annealing effect on crystalline yttria-stabilized zirconia gate dielectrics
10.1088/0268-1242/18/2/316
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Main Authors: | Wang, S.J., Ong, C.K. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/97756 |
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Institution: | National University of Singapore |
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