Resist materials for proton micromachining
10.1016/S0168-583X(99)00392-4
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sg-nus-scholar.10635-978082023-10-26T20:25:24Z Resist materials for proton micromachining Van Kan, J.A. Sanchez, J.L. Xu, B. Osipowicz, T. Watt, F. PHYSICS 10.1016/S0168-583X(99)00392-4 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 158 1 179-184 NIMBE 2014-10-16T09:39:33Z 2014-10-16T09:39:33Z 1999-09-02 Article Van Kan, J.A., Sanchez, J.L., Xu, B., Osipowicz, T., Watt, F. (1999-09-02). Resist materials for proton micromachining. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 158 (1) : 179-184. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(99)00392-4 0168583X http://scholarbank.nus.edu.sg/handle/10635/97808 000083666700030 Scopus |
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10.1016/S0168-583X(99)00392-4 |
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PHYSICS |
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PHYSICS Van Kan, J.A. Sanchez, J.L. Xu, B. Osipowicz, T. Watt, F. |
| format |
Article |
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Van Kan, J.A. Sanchez, J.L. Xu, B. Osipowicz, T. Watt, F. |
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Van Kan, J.A. Sanchez, J.L. Xu, B. Osipowicz, T. Watt, F. Resist materials for proton micromachining |
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Van Kan, J.A. |
| title |
Resist materials for proton micromachining |
| title_short |
Resist materials for proton micromachining |
| title_full |
Resist materials for proton micromachining |
| title_fullStr |
Resist materials for proton micromachining |
| title_full_unstemmed |
Resist materials for proton micromachining |
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resist materials for proton micromachining |
| publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/97808 |
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1781786746025934848 |