Resist materials for proton micromachining

10.1016/S0168-583X(99)00392-4

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Bibliographic Details
Main Authors: Van Kan, J.A., Sanchez, J.L., Xu, B., Osipowicz, T., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97808
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Institution: National University of Singapore

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