Micromachining using high energy light ions

US6455233

Saved in:
Bibliographic Details
Main Authors: WATT, FRANK, SPRINGHAM, STUART VICTOR, OSIPOWICZ, THOMAS, BREESE, MARK
Other Authors: PHYSICS
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32614
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore