Micromachining using high energy light ions

US6455233

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Bibliographic Details
Main Authors:	WATT, FRANK, SPRINGHAM, STUART VICTOR, OSIPOWICZ, THOMAS, BREESE, MARK
Other Authors:	PHYSICS
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32614
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32614
record_format	dspace
spelling	sg-nus-scholar.10635-326142020-05-26T07:46:44Z Micromachining using high energy light ions WATT, FRANK SPRINGHAM, STUART VICTOR OSIPOWICZ, THOMAS BREESE, MARK PHYSICS NATIONAL UNIVERSITY OF SINGAPORE US6455233 Granted Patent 2012-05-02T02:27:49Z 2012-05-02T02:27:49Z 2002-09-24 Patent WATT, FRANK, SPRINGHAM, STUART VICTOR, OSIPOWICZ, THOMAS, BREESE, MARK (2002-09-24). Micromachining using high energy light ions. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32614 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	US6455233
author2	PHYSICS
author_facet	PHYSICS WATT, FRANK SPRINGHAM, STUART VICTOR OSIPOWICZ, THOMAS BREESE, MARK
format	Patent
author	WATT, FRANK SPRINGHAM, STUART VICTOR OSIPOWICZ, THOMAS BREESE, MARK
spellingShingle	WATT, FRANK SPRINGHAM, STUART VICTOR OSIPOWICZ, THOMAS BREESE, MARK Micromachining using high energy light ions
author_sort	WATT, FRANK
title	Micromachining using high energy light ions
title_short	Micromachining using high energy light ions
title_full	Micromachining using high energy light ions
title_fullStr	Micromachining using high energy light ions
title_full_unstemmed	Micromachining using high energy light ions
title_sort	micromachining using high energy light ions
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32614
_version_	1681081255569915904

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