Surface transient effects in ultralow-energy O2 + sputtering of silicon

10.1002/sia.2058

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Bibliographic Details
Main Authors:	Chanbasha, A.R., Wee, A.T.S.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98146
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Institution:	National University of Singapore

Description
Summary:	10.1002/sia.2058

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