Surface transient effects in ultralow-energy O2 + sputtering of silicon

10.1002/sia.2058

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Main Authors:	Chanbasha, A.R., Wee, A.T.S.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98146
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98146
record_format	dspace
spelling	sg-nus-scholar.10635-981462023-10-29T22:34:28Z Surface transient effects in ultralow-energy O2 + sputtering of silicon Chanbasha, A.R. Wee, A.T.S. PHYSICS Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy 10.1002/sia.2058 Surface and Interface Analysis 37 7 628-632 SIAND 2014-10-16T09:43:33Z 2014-10-16T09:43:33Z 2005-07 Article Chanbasha, A.R., Wee, A.T.S. (2005-07). Surface transient effects in ultralow-energy O2 + sputtering of silicon. Surface and Interface Analysis 37 (7) : 628-632. ScholarBank@NUS Repository. https://doi.org/10.1002/sia.2058 01422421 http://scholarbank.nus.edu.sg/handle/10635/98146 000230222600005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy
spellingShingle	Secondary ion mass spectroscopy Sputter rate Surface transient Ultralow energy Chanbasha, A.R. Wee, A.T.S. Surface transient effects in ultralow-energy O2 + sputtering of silicon
description	10.1002/sia.2058
author2	PHYSICS
author_facet	PHYSICS Chanbasha, A.R. Wee, A.T.S.
format	Article
author	Chanbasha, A.R. Wee, A.T.S.
author_sort	Chanbasha, A.R.
title	Surface transient effects in ultralow-energy O2 + sputtering of silicon
title_short	Surface transient effects in ultralow-energy O2 + sputtering of silicon
title_full	Surface transient effects in ultralow-energy O2 + sputtering of silicon
title_fullStr	Surface transient effects in ultralow-energy O2 + sputtering of silicon
title_full_unstemmed	Surface transient effects in ultralow-energy O2 + sputtering of silicon
title_sort	surface transient effects in ultralow-energy o2 + sputtering of silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98146
_version_	1781786811953053696

Surface transient effects in ultralow-energy O2 + sputtering of silicon

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