Three-dimensional nanolithography using proton beam writing

10.1063/1.1604468

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Bibliographic Details
Main Authors:	Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98400
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98400
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spelling	sg-nus-scholar.10635-984002023-10-29T22:30:22Z Three-dimensional nanolithography using proton beam writing Van Kan, J.A. Bettiol, A.A. Watt, F. PHYSICS 10.1063/1.1604468 Applied Physics Letters 83 8 1629-1631 APPLA 2014-10-16T09:46:39Z 2014-10-16T09:46:39Z 2003-08-25 Article Van Kan, J.A., Bettiol, A.A., Watt, F. (2003-08-25). Three-dimensional nanolithography using proton beam writing. Applied Physics Letters 83 (8) : 1629-1631. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1604468 00036951 http://scholarbank.nus.edu.sg/handle/10635/98400 000184844100045 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1604468
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Bettiol, A.A. Watt, F.
format	Article
author	Van Kan, J.A. Bettiol, A.A. Watt, F.
spellingShingle	Van Kan, J.A. Bettiol, A.A. Watt, F. Three-dimensional nanolithography using proton beam writing
author_sort	Van Kan, J.A.
title	Three-dimensional nanolithography using proton beam writing
title_short	Three-dimensional nanolithography using proton beam writing
title_full	Three-dimensional nanolithography using proton beam writing
title_fullStr	Three-dimensional nanolithography using proton beam writing
title_full_unstemmed	Three-dimensional nanolithography using proton beam writing
title_sort	three-dimensional nanolithography using proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98400
_version_	1781786865357029376

Three-dimensional nanolithography using proton beam writing

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