Three-dimensional nanolithography using proton beam writing

Three-dimensional nanolithography using proton beam writing

10.1063/1.1604468

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Bibliographic Details
Main Authors:	Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98400
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Institution:	National University of Singapore

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