Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces

10.1116/1.3406130

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Bibliographic Details
Main Authors:	Ow, Y.S., Azimi, S., Breese, M.B.H., Teo, E.J., Mangaiyarkarasi, D.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98685
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98685
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spelling	sg-nus-scholar.10635-986852024-11-14T18:38:46Z Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces Ow, Y.S. Azimi, S. Breese, M.B.H. Teo, E.J. Mangaiyarkarasi, D. PHYSICS 10.1116/1.3406130 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 28 3 500-505 JVTBD 2014-10-16T09:50:11Z 2014-10-16T09:50:11Z 2010-05 Conference Paper Ow, Y.S., Azimi, S., Breese, M.B.H., Teo, E.J., Mangaiyarkarasi, D. (2010-05). Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 28 (3) : 500-505. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3406130 10711023 http://scholarbank.nus.edu.sg/handle/10635/98685 000278182700012 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.3406130
author2	PHYSICS
author_facet	PHYSICS Ow, Y.S. Azimi, S. Breese, M.B.H. Teo, E.J. Mangaiyarkarasi, D.
format	Conference or Workshop Item
author	Ow, Y.S. Azimi, S. Breese, M.B.H. Teo, E.J. Mangaiyarkarasi, D.
spellingShingle	Ow, Y.S. Azimi, S. Breese, M.B.H. Teo, E.J. Mangaiyarkarasi, D. Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces
author_sort	Ow, Y.S.
title	Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces
title_short	Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces
title_full	Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces
title_fullStr	Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces
title_full_unstemmed	Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces
title_sort	effects of focused mev ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98685
_version_	1821185212345745408

Effects of focused MeV ion beam irradiation on the roughness of electrochemically micromachined silicon surfaces

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