Fabrication of micro-optical components in polymer using proton beam micro-machining and modification

Fabrication of micro-optical components in polymer using proton beam micro-machining and modification

10.1016/S0168-583X(03)01021-8

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Bibliographic Details
Main Authors: Bettiol, A.A., Sum, T.C., Van Kan, J.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Grating
Micro-lens
Micro-machining
PMMA
SU-8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98705
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/98705

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