Fabrication of micro-optical components in polymer using proton beam micro-machining and modification

Fabrication of micro-optical components in polymer using proton beam micro-machining and modification

10.1016/S0168-583X(03)01021-8

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Bibliographic Details
Main Authors: Bettiol, A.A., Sum, T.C., Van Kan, J.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Grating
Micro-lens
Micro-machining
PMMA
SU-8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98705
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Institution: National University of Singapore
id sg-nus-scholar.10635-98705
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spelling sg-nus-scholar.10635-987052024-11-14T01:01:12Z Fabrication of micro-optical components in polymer using proton beam micro-machining and modification Bettiol, A.A. Sum, T.C. Van Kan, J.A. Watt, F. PHYSICS Grating Micro-lens Micro-machining PMMA SU-8 10.1016/S0168-583X(03)01021-8 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 250-255 NIMBE 2014-10-16T09:50:25Z 2014-10-16T09:50:25Z 2003-09 Conference Paper Bettiol, A.A., Sum, T.C., Van Kan, J.A., Watt, F. (2003-09). Fabrication of micro-optical components in polymer using proton beam micro-machining and modification. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 : 250-255. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01021-8 0168583X http://scholarbank.nus.edu.sg/handle/10635/98705 000185352300047 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Grating
Micro-lens
Micro-machining
PMMA
SU-8
spellingShingle Grating
Micro-lens
Micro-machining
PMMA
SU-8
Bettiol, A.A.
Sum, T.C.
Van Kan, J.A.
Watt, F.
Fabrication of micro-optical components in polymer using proton beam micro-machining and modification
description 10.1016/S0168-583X(03)01021-8
author2 PHYSICS
author_facet PHYSICS
Bettiol, A.A.
Sum, T.C.
Van Kan, J.A.
Watt, F.
format Conference or Workshop Item
author Bettiol, A.A.
Sum, T.C.
Van Kan, J.A.
Watt, F.
author_sort Bettiol, A.A.
title Fabrication of micro-optical components in polymer using proton beam micro-machining and modification
title_short Fabrication of micro-optical components in polymer using proton beam micro-machining and modification
title_full Fabrication of micro-optical components in polymer using proton beam micro-machining and modification
title_fullStr Fabrication of micro-optical components in polymer using proton beam micro-machining and modification
title_full_unstemmed Fabrication of micro-optical components in polymer using proton beam micro-machining and modification
title_sort fabrication of micro-optical components in polymer using proton beam micro-machining and modification
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98705
_version_ 1821206833594892288

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