Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures

Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013

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Bibliographic Details
Main Authors:	Azimi, S., Breese, M.B.H.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Arbitrary-shaped Micro- and nano-fabrication Multilevel Silicon Suspended Three-dimensional
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98714
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98714
record_format	dspace
spelling	sg-nus-scholar.10635-987142024-11-14T18:39:15Z Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures Azimi, S. Breese, M.B.H. PHYSICS Arbitrary-shaped Micro- and nano-fabrication Multilevel Silicon Suspended Three-dimensional Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013 2 158-161 2014-10-16T09:50:33Z 2014-10-16T09:50:33Z 2013 Conference Paper Azimi, S.,Breese, M.B.H. (2013). Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures. Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013 2 : 158-161. ScholarBank@NUS Repository. 9781482205848 http://scholarbank.nus.edu.sg/handle/10635/98714 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Arbitrary-shaped Micro- and nano-fabrication Multilevel Silicon Suspended Three-dimensional
spellingShingle	Arbitrary-shaped Micro- and nano-fabrication Multilevel Silicon Suspended Three-dimensional Azimi, S. Breese, M.B.H. Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures
description	Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
author2	PHYSICS
author_facet	PHYSICS Azimi, S. Breese, M.B.H.
format	Conference or Workshop Item
author	Azimi, S. Breese, M.B.H.
author_sort	Azimi, S.
title	Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures
title_short	Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures
title_full	Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures
title_fullStr	Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures
title_full_unstemmed	Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures
title_sort	fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98714
_version_	1821218109375119360

Fabrication of suspended multilevel three-dimensional silicon micro- and nano-structures

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