Integration of nano-scale components and supports in micromachined 3D silicon structures

Integration of nano-scale components and supports in micromachined 3D silicon structures

10.1088/0960-1317/24/4/045008

Saved in:
Bibliographic Details
Main Authors: Song, J., Azimi, S., Dang, Z.Y., Breese, M.B.H.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
3D nano-scale silicon machining
electrochemical anodization
free-standing membranes
ion irradiation
silicon nanostencils
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96945
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/96945

Similar Items