Integration of nano-scale components and supports in micromachined 3D silicon structures

Integration of nano-scale components and supports in micromachined 3D silicon structures

10.1088/0960-1317/24/4/045008

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Bibliographic Details
Main Authors: Song, J., Azimi, S., Dang, Z.Y., Breese, M.B.H.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
3D nano-scale silicon machining
electrochemical anodization
free-standing membranes
ion irradiation
silicon nanostencils
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96945
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Institution: National University of Singapore
id sg-nus-scholar.10635-96945
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spelling sg-nus-scholar.10635-969452024-11-14T18:39:10Z Integration of nano-scale components and supports in micromachined 3D silicon structures Song, J. Azimi, S. Dang, Z.Y. Breese, M.B.H. PHYSICS 3D nano-scale silicon machining electrochemical anodization free-standing membranes ion irradiation silicon nanostencils 10.1088/0960-1317/24/4/045008 Journal of Micromechanics and Microengineering 24 4 - JMMIE 2014-10-16T09:29:28Z 2014-10-16T09:29:28Z 2014 Article Song, J., Azimi, S., Dang, Z.Y., Breese, M.B.H. (2014). Integration of nano-scale components and supports in micromachined 3D silicon structures. Journal of Micromechanics and Microengineering 24 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/24/4/045008 13616439 http://scholarbank.nus.edu.sg/handle/10635/96945 000334306100008 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic 3D nano-scale silicon machining
electrochemical anodization
free-standing membranes
ion irradiation
silicon nanostencils
spellingShingle 3D nano-scale silicon machining
electrochemical anodization
free-standing membranes
ion irradiation
silicon nanostencils
Song, J.
Azimi, S.
Dang, Z.Y.
Breese, M.B.H.
Integration of nano-scale components and supports in micromachined 3D silicon structures
description 10.1088/0960-1317/24/4/045008
author2 PHYSICS
author_facet PHYSICS
Song, J.
Azimi, S.
Dang, Z.Y.
Breese, M.B.H.
format Article
author Song, J.
Azimi, S.
Dang, Z.Y.
Breese, M.B.H.
author_sort Song, J.
title Integration of nano-scale components and supports in micromachined 3D silicon structures
title_short Integration of nano-scale components and supports in micromachined 3D silicon structures
title_full Integration of nano-scale components and supports in micromachined 3D silicon structures
title_fullStr Integration of nano-scale components and supports in micromachined 3D silicon structures
title_full_unstemmed Integration of nano-scale components and supports in micromachined 3D silicon structures
title_sort integration of nano-scale components and supports in micromachined 3d silicon structures
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96945
_version_ 1821219312814260224

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