Integration of nano-scale components and supports in micromachined 3D silicon structures
10.1088/0960-1317/24/4/045008
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/96945 |
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| Institution: | National University of Singapore |