Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing

10.1016/j.tsf.2005.09.046

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Bibliographic Details
Main Authors:	Liew, S.L., Balakrisnan, B., Chow, S.Y., Lai, M.Y., Wang, W.D., Lee, K.Y., Ho, C.S., Osipowicz, T., Chi, D.Z.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Erbium Germanium Rapid thermal processing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98732
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98732
record_format	dspace
spelling	sg-nus-scholar.10635-987322023-10-25T23:04:52Z Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing Liew, S.L. Balakrisnan, B. Chow, S.Y. Lai, M.Y. Wang, W.D. Lee, K.Y. Ho, C.S. Osipowicz, T. Chi, D.Z. PHYSICS Erbium Germanium Rapid thermal processing 10.1016/j.tsf.2005.09.046 Thin Solid Films 504 1-2 81-85 THSFA 2014-10-16T09:50:46Z 2014-10-16T09:50:46Z 2006-05-10 Conference Paper Liew, S.L., Balakrisnan, B., Chow, S.Y., Lai, M.Y., Wang, W.D., Lee, K.Y., Ho, C.S., Osipowicz, T., Chi, D.Z. (2006-05-10). Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing. Thin Solid Films 504 (1-2) : 81-85. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2005.09.046 00406090 http://scholarbank.nus.edu.sg/handle/10635/98732 000236486200020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Erbium Germanium Rapid thermal processing
spellingShingle	Erbium Germanium Rapid thermal processing Liew, S.L. Balakrisnan, B. Chow, S.Y. Lai, M.Y. Wang, W.D. Lee, K.Y. Ho, C.S. Osipowicz, T. Chi, D.Z. Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing
description	10.1016/j.tsf.2005.09.046
author2	PHYSICS
author_facet	PHYSICS Liew, S.L. Balakrisnan, B. Chow, S.Y. Lai, M.Y. Wang, W.D. Lee, K.Y. Ho, C.S. Osipowicz, T. Chi, D.Z.
format	Conference or Workshop Item
author	Liew, S.L. Balakrisnan, B. Chow, S.Y. Lai, M.Y. Wang, W.D. Lee, K.Y. Ho, C.S. Osipowicz, T. Chi, D.Z.
author_sort	Liew, S.L.
title	Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing
title_short	Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing
title_full	Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing
title_fullStr	Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing
title_full_unstemmed	Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing
title_sort	growth of high quality er-ge films on ge(001) substrates by suppressing oxygen contamination during germanidation annealing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98732
_version_	1781786938699677696

Growth of high quality Er-Ge films on Ge(001) substrates by suppressing oxygen contamination during germanidation annealing

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