Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation
10.1116/1.1868693
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sg-nus-scholar.10635-987932023-10-26T20:35:19Z Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation Tan, S.C. See, A. Yu, T. Shen, Z.X. Lin, J. PHYSICS 10.1116/1.1868693 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 2 480-485 JVTBD 2014-10-16T09:51:31Z 2014-10-16T09:51:31Z 2005 Conference Paper Tan, S.C., See, A., Yu, T., Shen, Z.X., Lin, J. (2005). Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (2) : 480-485. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1868693 10711023 http://scholarbank.nus.edu.sg/handle/10635/98793 000228788600023 Scopus |
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Singapore Singapore |
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10.1116/1.1868693 |
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PHYSICS |
| author_facet |
PHYSICS Tan, S.C. See, A. Yu, T. Shen, Z.X. Lin, J. |
| format |
Conference or Workshop Item |
| author |
Tan, S.C. See, A. Yu, T. Shen, Z.X. Lin, J. |
| spellingShingle |
Tan, S.C. See, A. Yu, T. Shen, Z.X. Lin, J. Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation |
| author_sort |
Tan, S.C. |
| title |
Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation |
| title_short |
Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation |
| title_full |
Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation |
| title_fullStr |
Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation |
| title_full_unstemmed |
Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation |
| title_sort |
mechanism of simultaneous formation of refractory-metal free c40 and c49 tisi2 induced by q-switched nd: yttrium-aluminum-garnet laser irradiation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98793 |
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1781786949284003840 |