Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications

Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications

10.1016/j.nimb.2011.02.051

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Bibliographic Details
Main Authors: Udalagama, C., Teo, E.J., Chan, S.F., Kumar, V.S., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Ion lithography
Microfluidics
Photonics
Proton beam writing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98854
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2011.02.051

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