Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications
10.1016/j.nimb.2011.02.051
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98854 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-98854 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-988542023-10-25T23:07:41Z Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications Udalagama, C. Teo, E.J. Chan, S.F. Kumar, V.S. Bettiol, A.A. Watt, F. PHYSICS Ion lithography Microfluidics Photonics Proton beam writing 10.1016/j.nimb.2011.02.051 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 20 2417-2421 NIMBE 2014-10-16T09:52:15Z 2014-10-16T09:52:15Z 2011-10-15 Conference Paper Udalagama, C., Teo, E.J., Chan, S.F., Kumar, V.S., Bettiol, A.A., Watt, F. (2011-10-15). Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 (20) : 2417-2421. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2011.02.051 0168583X http://scholarbank.nus.edu.sg/handle/10635/98854 000296544900053 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Ion lithography Microfluidics Photonics Proton beam writing |
| spellingShingle |
Ion lithography Microfluidics Photonics Proton beam writing Udalagama, C. Teo, E.J. Chan, S.F. Kumar, V.S. Bettiol, A.A. Watt, F. Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications |
| description |
10.1016/j.nimb.2011.02.051 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Udalagama, C. Teo, E.J. Chan, S.F. Kumar, V.S. Bettiol, A.A. Watt, F. |
| format |
Conference or Workshop Item |
| author |
Udalagama, C. Teo, E.J. Chan, S.F. Kumar, V.S. Bettiol, A.A. Watt, F. |
| author_sort |
Udalagama, C. |
| title |
Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications |
| title_short |
Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications |
| title_full |
Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications |
| title_fullStr |
Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications |
| title_full_unstemmed |
Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications |
| title_sort |
proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98854 |
| _version_ |
1781786961616306176 |