Simulation for deposition of ZnO thin film layer by kinetic Monte Carlo method

Simulation for deposition of ZnO thin film layer by kinetic Monte Carlo method

10.1179/143307509X437437

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Bibliographic Details
Main Authors: Dee, C.F., Lee, J.D., Sow, C.H., Majlis, B.Y., Hamzah, A., Abdullah, H., Lee, S.-K.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Deposition
Epitaxial growth
Kinetic Monte Carlo
Simulation
Surface roughness
ZnO
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98877
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Institution: National University of Singapore
Description
Summary:10.1179/143307509X437437

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