Simulation for deposition of ZnO thin film layer by kinetic Monte Carlo method
10.1179/143307509X437437
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Main Authors: | Dee, C.F., Lee, J.D., Sow, C.H., Majlis, B.Y., Hamzah, A., Abdullah, H., Lee, S.-K. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98877 |
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Institution: | National University of Singapore |
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