Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy

10.1109/EDSSC.2007.4450216

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Bibliographic Details
Main Authors:	Wang, Y., Zhang, D.H., Huang, Z.M., Liu, W., Li, J.H., Liu, C.J., Wee, A.T.S.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98904
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-989042023-10-26T09:55:49Z Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy Wang, Y. Zhang, D.H. Huang, Z.M. Liu, W. Li, J.H. Liu, C.J. Wee, A.T.S. PHYSICS 10.1109/EDSSC.2007.4450216 IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 677-680 2014-10-16T09:52:49Z 2014-10-16T09:52:49Z 2007 Conference Paper Wang, Y., Zhang, D.H., Huang, Z.M., Liu, W., Li, J.H., Liu, C.J., Wee, A.T.S. (2007). Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy. IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 : 677-680. ScholarBank@NUS Repository. https://doi.org/10.1109/EDSSC.2007.4450216 1424406374 http://scholarbank.nus.edu.sg/handle/10635/98904 000253450200127 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/EDSSC.2007.4450216
author2	PHYSICS
author_facet	PHYSICS Wang, Y. Zhang, D.H. Huang, Z.M. Liu, W. Li, J.H. Liu, C.J. Wee, A.T.S.
format	Conference or Workshop Item
author	Wang, Y. Zhang, D.H. Huang, Z.M. Liu, W. Li, J.H. Liu, C.J. Wee, A.T.S.
spellingShingle	Wang, Y. Zhang, D.H. Huang, Z.M. Liu, W. Li, J.H. Liu, C.J. Wee, A.T.S. Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy
author_sort	Wang, Y.
title	Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy
title_short	Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy
title_full	Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy
title_fullStr	Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy
title_full_unstemmed	Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy
title_sort	study of ion-implanted in sb1-xnx alloys using secondary ion mass spectroscopy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98904
_version_	1781786971732967424

Study of ion-implanted in Sb1-xNx alloys using secondary ion mass spectroscopy

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