Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching

Proceedings - Electrochemical Society

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Main Authors:	Blackwood, D.J., Teo, E.J., Breese, M.B.H., Bettiol, A.A.
Other Authors:	MATERIALS SCIENCE
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98939
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98939
record_format	dspace
spelling	sg-nus-scholar.10635-989392015-01-12T05:15:00Z Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching Blackwood, D.J. Teo, E.J. Breese, M.B.H. Bettiol, A.A. MATERIALS SCIENCE PHYSICS Proceedings - Electrochemical Society 9 108-116 2014-10-16T09:53:16Z 2014-10-16T09:53:16Z 2004 Conference Paper Blackwood, D.J.,Teo, E.J.,Breese, M.B.H.,Bettiol, A.A. (2004). Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching. Proceedings - Electrochemical Society 9 : 108-116. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/98939 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings - Electrochemical Society
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE Blackwood, D.J. Teo, E.J. Breese, M.B.H. Bettiol, A.A.
format	Conference or Workshop Item
author	Blackwood, D.J. Teo, E.J. Breese, M.B.H. Bettiol, A.A.
spellingShingle	Blackwood, D.J. Teo, E.J. Breese, M.B.H. Bettiol, A.A. Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching
author_sort	Blackwood, D.J.
title	Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching
title_short	Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching
title_full	Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching
title_fullStr	Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching
title_full_unstemmed	Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching
title_sort	three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98939
_version_	1681092115662110720

Three-dimensional microstructures in silicon via the combination of light-ion beam writing and electrochemical etching

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