Mathematical models in integrated-circuit manufacturing: A review
In this paper, we review mathematical models that have been developed for improving the performance of a wafer fab that faces yield uncertainty and system uncertainty such as machine failures. Specifically, we focus on models that deal with the design and operational issues arising from a wafer fab....
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| Main Authors: | , |
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| Format: | text |
| Language: | English |
| Published: |
Institutional Knowledge at Singapore Management University
1993
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| Subjects: | |
| Online Access: | https://ink.library.smu.edu.sg/lkcsb_research/1065 https://doi.org/10.1007/978-1-4615-3166-1_20 |
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| Institution: | Singapore Management University |
| Language: | English |
| Summary: | In this paper, we review mathematical models that have been developed for improving the performance of a wafer fab that faces yield uncertainty and system uncertainty such as machine failures. Specifically, we focus on models that deal with the design and operational issues arising from a wafer fab. We classify these models into two main categories: yield models and wafer-design models. These models address different strategic and planning issues that related to yield uncertainty and system uncertainty in IC manufacturing, and can be used to predict system performance of a specific production plan or system design. Besides the predictive power, these models can be used for optimization. |
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