Mathematical models in integrated-circuit manufacturing: A review

• Main Authors: TANG, Christopher S., DEMEESTER, Lieven
• Format: text
• Language: English
• Published: Institutional Knowledge at Singapore Management University 1993
• Subjects: Wafer fabrication; machine failures; integrated circuits; Operations and Supply Chain Management; Operations Research, Systems Engineering and Industrial Engineering
• Online Access: https://ink.library.smu.edu.sg/lkcsb_research/1065; https://doi.org/10.1007/978-1-4615-3166-1_20
• Institution: Singapore Management University

In this paper, we review mathematical models that have been developed for improving the performance of a wafer fab that faces yield uncertainty and system uncertainty such as machine failures. Specifically, we focus on models that deal with the design and operational issues arising from a wafer fab. We classify these models into two main categories: yield models and wafer-design models. These models address different strategic and planning issues that related to yield uncertainty and system uncertainty in IC manufacturing, and can be used to predict system performance of a specific production plan or system design. Besides the predictive power, these models can be used for optimization.