Mathematical models in integrated-circuit manufacturing: A review
In this paper, we review mathematical models that have been developed for improving the performance of a wafer fab that faces yield uncertainty and system uncertainty such as machine failures. Specifically, we focus on models that deal with the design and operational issues arising from a wafer fab....
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| 格式: | text |
| 語言: | English |
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Institutional Knowledge at Singapore Management University
1993
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| 在線閱讀: | https://ink.library.smu.edu.sg/lkcsb_research/1065 https://doi.org/10.1007/978-1-4615-3166-1_20 |
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