Surface roughness modelling with neural networks
Accurate surface modelling has become important in the modem integrated circuits manufacturing technology. On all the real surfaces microscopic roughness appears, which affects many electronic properties of the material, which in turn decides the yield and reliability of the integrated circuits. The...
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| Main Authors: | , , |
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| Format: | text |
| Language: | English |
| Published: |
Institutional Knowledge at Singapore Management University
2002
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| Subjects: | |
| Online Access: | https://ink.library.smu.edu.sg/sis_research/7427 |
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| Institution: | Singapore Management University |
| Language: | English |